Vacuum arc ion and plasma source Raduga-5. Technological applications

A. I. Ryabchikov, I. B. Stepanov, S. V. Dektyarev, I. A. Shulepov, E. I. Lukonin, D. O. Sivin

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Аннотация

The paper discusses examples of realizing the regimes of high-intensity and high-concentration ion implantation, and plasma deposition of coatings including the conditions of dynamic ion mixing using "Raduga-5", a source of accelerated ions and plasma based on the DC vacuum arc discharge. It is shown that when a target is treated with high average power beams, it is possible to dope a material at depths exceeding the projective ion range by an order of magnitude. Features of ion beam application at different stages of ion plasma deposition of coatings are considered. Examples are given for the formation of wide transition layers between the coating and the substrate under conditions of intensive ion mixing. Mechanisms of change in the properties of the coatings formed with decreasing microparticle fractions in the arc plasma stream are considered.

Язык оригиналаАнглийский
Название основной публикации5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001
ИздательInstitute of Electrical and Electronics Engineers Inc.
Страницы380-383
Число страниц4
Том1
ISBN (печатное издание)0780370082, 9780780370081
DOI
СостояниеОпубликовано - 2001
Событие5th Korea-Russia International Symposium on Science and Technology, KORUS 2001 - Tomsk, Российская Федерация
Продолжительность: 26 июн 20013 июл 2001

Другое

Другое5th Korea-Russia International Symposium on Science and Technology, KORUS 2001
СтранаРоссийская Федерация
ГородTomsk
Период26.6.013.7.01

ASJC Scopus subject areas

  • Clinical Biochemistry
  • Computer Networks and Communications
  • Biotechnology
  • Civil and Structural Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films

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    Ryabchikov, A. I., Stepanov, I. B., Dektyarev, S. V., Shulepov, I. A., Lukonin, E. I., & Sivin, D. O. (2001). Vacuum arc ion and plasma source Raduga-5. Technological applications. В 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001 (Том 1, стр. 380-383). [975158] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/KORUS.2001.975158