Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing

Аннотация

In this paper the latest results obtained for (Ti, Al)N, TiSiB coating deposition using a hybrid technology are presented. This technology includes several approaches. For sample pretreatment the repetitively pulsed high-current ion-beam and high-frequency short-pulsed metal plasma immersion ion surface treatment were used. An intermediate layer between coating and sample surface was formed by metal ion implantation using a high-current vacuum ion-beam and plasma source "Raduga-5". The vacuum arc microdroplet-filtered metal plasma coating deposition was realized under ion mixing using high-frequency short-pulsed plasma immersion ion technology. It was experimentally shown that for deposition of TiAlN coatings, mono (Ti, Al) and multi-element (TiAl) cathodes can be used. Phase and elemental composition, structural state, and mechanical properties of (Ti,Al)N and TiSiB coatings were observed, and they are presented in this paper.

Язык оригинала	Английский
Страницы (с-по)	8596-8600
Число страниц	5
Журнал	Surface and Coatings Technology
Том	201
Номер выпуска	19-20 SPEC. ISS.
DOI	https://doi.org/10.1016/j.surfcoat.2006.09.320
Состояние	Опубликовано - 5 авг 2007

ASJC Scopus subject areas

Surfaces, Coatings and Films
Condensed Matter Physics
Surfaces and Interfaces

Доступ к документу

10.1016/j.surfcoat.2006.09.320

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Цитировать

Stepanov, I. B., Ryabchikov, A. I., Nochovnaya, N. A., Sharkeev, Y. P., Shulepov, I. A., Ryabchikov, I. A., Sivin, D. O., & Fortuna, S. V. (2007). Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing. Surface and Coatings Technology, 201(19-20 SPEC. ISS.), 8596-8600. https://doi.org/10.1016/j.surfcoat.2006.09.320

Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing. / Stepanov, I. B.; Ryabchikov, A. I.; Nochovnaya, N. A.; Sharkeev, Y. P.; Shulepov, I. A.; Ryabchikov, I. A.; Sivin, Denis Olegovich; Fortuna, S. V.

В: Surface and Coatings Technology, Том 201, № 19-20 SPEC. ISS., 05.08.2007, стр. 8596-8600.

Результат исследований: Материалы для журнала › Статья › рецензирование

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abstract = "In this paper the latest results obtained for (Ti, Al)N, TiSiB coating deposition using a hybrid technology are presented. This technology includes several approaches. For sample pretreatment the repetitively pulsed high-current ion-beam and high-frequency short-pulsed metal plasma immersion ion surface treatment were used. An intermediate layer between coating and sample surface was formed by metal ion implantation using a high-current vacuum ion-beam and plasma source {"}Raduga-5{"}. The vacuum arc microdroplet-filtered metal plasma coating deposition was realized under ion mixing using high-frequency short-pulsed plasma immersion ion technology. It was experimentally shown that for deposition of TiAlN coatings, mono (Ti, Al) and multi-element (TiAl) cathodes can be used. Phase and elemental composition, structural state, and mechanical properties of (Ti,Al)N and TiSiB coatings were observed, and they are presented in this paper.",

keywords = "Coating deposition, DC vacuum arc, Hybrid technologies, Microdroplet-filtered metal plasma",

author = "Stepanov, {I. B.} and Ryabchikov, {A. I.} and Nochovnaya, {N. A.} and Sharkeev, {Y. P.} and Shulepov, {I. A.} and Ryabchikov, {I. A.} and Sivin, {Denis Olegovich} and Fortuna, {S. V.}",

year = "2007",

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doi = "10.1016/j.surfcoat.2006.09.320",

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AU - Stepanov, I. B.

AU - Ryabchikov, A. I.

AU - Nochovnaya, N. A.

AU - Sharkeev, Y. P.

AU - Shulepov, I. A.

AU - Ryabchikov, I. A.

AU - Sivin, Denis Olegovich

AU - Fortuna, S. V.

PY - 2007/8/5

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N2 - In this paper the latest results obtained for (Ti, Al)N, TiSiB coating deposition using a hybrid technology are presented. This technology includes several approaches. For sample pretreatment the repetitively pulsed high-current ion-beam and high-frequency short-pulsed metal plasma immersion ion surface treatment were used. An intermediate layer between coating and sample surface was formed by metal ion implantation using a high-current vacuum ion-beam and plasma source "Raduga-5". The vacuum arc microdroplet-filtered metal plasma coating deposition was realized under ion mixing using high-frequency short-pulsed plasma immersion ion technology. It was experimentally shown that for deposition of TiAlN coatings, mono (Ti, Al) and multi-element (TiAl) cathodes can be used. Phase and elemental composition, structural state, and mechanical properties of (Ti,Al)N and TiSiB coatings were observed, and they are presented in this paper.

AB - In this paper the latest results obtained for (Ti, Al)N, TiSiB coating deposition using a hybrid technology are presented. This technology includes several approaches. For sample pretreatment the repetitively pulsed high-current ion-beam and high-frequency short-pulsed metal plasma immersion ion surface treatment were used. An intermediate layer between coating and sample surface was formed by metal ion implantation using a high-current vacuum ion-beam and plasma source "Raduga-5". The vacuum arc microdroplet-filtered metal plasma coating deposition was realized under ion mixing using high-frequency short-pulsed plasma immersion ion technology. It was experimentally shown that for deposition of TiAlN coatings, mono (Ti, Al) and multi-element (TiAl) cathodes can be used. Phase and elemental composition, structural state, and mechanical properties of (Ti,Al)N and TiSiB coatings were observed, and they are presented in this paper.

KW - Coating deposition

KW - DC vacuum arc

KW - Hybrid technologies

KW - Microdroplet-filtered metal plasma

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