Выдержка
The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with Zr/Al>1 produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate a D achieving up to 80nm/min at relatively low value of the magnetron target power density W t≈45 W/cm 2, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering are highly elastic and exhibit relatively high hardness (typically H≈18 to 19GPa), low effective Young's modulus E * satisfying the ratio H/E *>0.1 and high elastic recovery W e up to 78%, and highly elastic Zr-Al-O oxide films with H/E *>0.1 exhibit an enhanced resistance to cracking.
| Язык оригинала | Английский |
|---|---|
| Страницы (с-по) | 2105-2109 |
| Число страниц | 5 |
| Журнал | Surface and Coatings Technology |
| Том | 206 |
| Номер выпуска | 8-9 |
| DOI | |
| Состояние | Опубликовано - 15 янв 2012 |
Отпечаток
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
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Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking. / Musil, J.; Sklenka, J.; Cerstvy, R.
В: Surface and Coatings Technology, Том 206, № 8-9, 15.01.2012, стр. 2105-2109.Результат исследований: Материалы для журнала › Статья
}
TY - JOUR
T1 - Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking
AU - Musil, J.
AU - Sklenka, J.
AU - Cerstvy, R.
PY - 2012/1/15
Y1 - 2012/1/15
N2 - The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with Zr/Al>1 produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate a D achieving up to 80nm/min at relatively low value of the magnetron target power density W t≈45 W/cm 2, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering are highly elastic and exhibit relatively high hardness (typically H≈18 to 19GPa), low effective Young's modulus E * satisfying the ratio H/E *>0.1 and high elastic recovery W e up to 78%, and highly elastic Zr-Al-O oxide films with H/E *>0.1 exhibit an enhanced resistance to cracking.
AB - The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with Zr/Al>1 produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate a D achieving up to 80nm/min at relatively low value of the magnetron target power density W t≈45 W/cm 2, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering are highly elastic and exhibit relatively high hardness (typically H≈18 to 19GPa), low effective Young's modulus E * satisfying the ratio H/E *>0.1 and high elastic recovery W e up to 78%, and highly elastic Zr-Al-O oxide films with H/E *>0.1 exhibit an enhanced resistance to cracking.
KW - DC pulsed reactive sputtering
KW - Dual magnetron
KW - Mechanical properties
KW - Optical properties
KW - Resistance to cracking
KW - Two-phase oxide
UR - http://www.scopus.com/inward/record.url?scp=84855262546&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84855262546&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2011.09.035
DO - 10.1016/j.surfcoat.2011.09.035
M3 - Article
AN - SCOPUS:84855262546
VL - 206
SP - 2105
EP - 2109
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 8-9
ER -