Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking

J. Musil, J. Sklenka, R. Cerstvy

Результат исследования: Материалы для журналаСтатья

43 Цитирования (Scopus)


The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with Zr/Al>1 produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate a D achieving up to 80nm/min at relatively low value of the magnetron target power density W t≈45 W/cm 2, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering are highly elastic and exhibit relatively high hardness (typically H≈18 to 19GPa), low effective Young's modulus E * satisfying the ratio H/E *>0.1 and high elastic recovery W e up to 78%, and highly elastic Zr-Al-O oxide films with H/E *>0.1 exhibit an enhanced resistance to cracking.

Язык оригиналаАнглийский
Страницы (с... по...)2105-2109
Количество страниц5
ЖурналSurface and Coatings Technology
Номер выпуска8-9
Статус публикацииОпубликовано - 15 янв 2012


ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry