Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking

J. Musil, J. Sklenka, R. Cerstvy

Результат исследований: Материалы для журналаСтатья

43 Цитирования (Scopus)

Выдержка

The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with Zr/Al>1 produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate a D achieving up to 80nm/min at relatively low value of the magnetron target power density W t≈45 W/cm 2, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering are highly elastic and exhibit relatively high hardness (typically H≈18 to 19GPa), low effective Young's modulus E * satisfying the ratio H/E *>0.1 and high elastic recovery W e up to 78%, and highly elastic Zr-Al-O oxide films with H/E *>0.1 exhibit an enhanced resistance to cracking.

Язык оригиналаАнглийский
Страницы (с-по)2105-2109
Число страниц5
ЖурналSurface and Coatings Technology
Том206
Номер выпуска8-9
DOI
СостояниеОпубликовано - 15 янв 2012

Отпечаток

Oxides
Oxide films
Sputtering
sputtering
coatings
Coatings
oxides
oxide films
Deposition rates
Magnetron sputtering
Transparency
radiant flux density
modulus of elasticity
magnetron sputtering
hardness
Elastic moduli
direct current
Hardness
recovery
mechanical properties

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Цитировать

Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking. / Musil, J.; Sklenka, J.; Cerstvy, R.

В: Surface and Coatings Technology, Том 206, № 8-9, 15.01.2012, стр. 2105-2109.

Результат исследований: Материалы для журналаСтатья

Musil, J. ; Sklenka, J. ; Cerstvy, R. / Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking. В: Surface and Coatings Technology. 2012 ; Том 206, № 8-9. стр. 2105-2109.
@article{127ddbabb4e141f99790bb9a9ab49170,
title = "Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking",
abstract = "The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with Zr/Al>1 produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate a D achieving up to 80nm/min at relatively low value of the magnetron target power density W t≈45 W/cm 2, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering are highly elastic and exhibit relatively high hardness (typically H≈18 to 19GPa), low effective Young's modulus E * satisfying the ratio H/E *>0.1 and high elastic recovery W e up to 78{\%}, and highly elastic Zr-Al-O oxide films with H/E *>0.1 exhibit an enhanced resistance to cracking.",
keywords = "DC pulsed reactive sputtering, Dual magnetron, Mechanical properties, Optical properties, Resistance to cracking, Two-phase oxide",
author = "J. Musil and J. Sklenka and R. Cerstvy",
year = "2012",
month = "1",
day = "15",
doi = "10.1016/j.surfcoat.2011.09.035",
language = "English",
volume = "206",
pages = "2105--2109",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "8-9",

}

TY - JOUR

T1 - Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking

AU - Musil, J.

AU - Sklenka, J.

AU - Cerstvy, R.

PY - 2012/1/15

Y1 - 2012/1/15

N2 - The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with Zr/Al>1 produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate a D achieving up to 80nm/min at relatively low value of the magnetron target power density W t≈45 W/cm 2, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering are highly elastic and exhibit relatively high hardness (typically H≈18 to 19GPa), low effective Young's modulus E * satisfying the ratio H/E *>0.1 and high elastic recovery W e up to 78%, and highly elastic Zr-Al-O oxide films with H/E *>0.1 exhibit an enhanced resistance to cracking.

AB - The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with Zr/Al>1 produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate a D achieving up to 80nm/min at relatively low value of the magnetron target power density W t≈45 W/cm 2, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering are highly elastic and exhibit relatively high hardness (typically H≈18 to 19GPa), low effective Young's modulus E * satisfying the ratio H/E *>0.1 and high elastic recovery W e up to 78%, and highly elastic Zr-Al-O oxide films with H/E *>0.1 exhibit an enhanced resistance to cracking.

KW - DC pulsed reactive sputtering

KW - Dual magnetron

KW - Mechanical properties

KW - Optical properties

KW - Resistance to cracking

KW - Two-phase oxide

UR - http://www.scopus.com/inward/record.url?scp=84855262546&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84855262546&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2011.09.035

DO - 10.1016/j.surfcoat.2011.09.035

M3 - Article

AN - SCOPUS:84855262546

VL - 206

SP - 2105

EP - 2109

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 8-9

ER -