TY - JOUR
T1 - Titanium macroparticles density decreasing on the sample, immersed in plasma, at repetitively pulsed biasing
AU - Sivin, Denis Olegovich
AU - Ryabchikov, A. I.
AU - Bumagina, A. I.
AU - Tupikova, Olga Sergeevna
AU - Daneikina, N. V.
PY - 2014/8/15
Y1 - 2014/8/15
N2 - We have studied the features of the Ti macroparticles (MPs) accumulation on a substrate immersed in a DC vacuum arc plasma with a high frequency short pulse negative bias. The influence of several factors including processing time, the parameters of bias potential, and substrate characteristics was defined. It was found that the MP accumulation on a repetitively biased substrate was uneven over time. A deposition of MPs to substrate were significantly decreased after 1 min of processing at bias parameters f = 105 p.p.s., φb = -2 kV and τ = 7 μs. It was experimentally shown that DC vacuum arc plasma without pre-filtering of MPs can be used for high frequency short pulse plasma immersion metal ion implantation.
AB - We have studied the features of the Ti macroparticles (MPs) accumulation on a substrate immersed in a DC vacuum arc plasma with a high frequency short pulse negative bias. The influence of several factors including processing time, the parameters of bias potential, and substrate characteristics was defined. It was found that the MP accumulation on a repetitively biased substrate was uneven over time. A deposition of MPs to substrate were significantly decreased after 1 min of processing at bias parameters f = 105 p.p.s., φb = -2 kV and τ = 7 μs. It was experimentally shown that DC vacuum arc plasma without pre-filtering of MPs can be used for high frequency short pulse plasma immersion metal ion implantation.
KW - Macroparticles
KW - Metal plasma
KW - Negative high-frequency short-pulsed bias
KW - Plasma immersion ion implantation
KW - Vacuum-arc
UR - http://www.scopus.com/inward/record.url?scp=84903315331&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84903315331&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2014.03.128
DO - 10.1016/j.apsusc.2014.03.128
M3 - Article
AN - SCOPUS:84903315331
VL - 310
SP - 126
EP - 129
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -