TiO2 nanoparticle detection by means of laser beam scattering in a hollow cathode plasma jet

R. Perekrestov, P. Kudrna, M. Tichý, I. Khalakhan, V. F. Myshkin

Результат исследований: Материалы для журналаСтатьярецензирование

12 Цитирования (Scopus)

Аннотация

The distribution of TiO2 nanoparticles in a plasma plume of a hollow cathode plasma jet is being studied in this work. The method is based on the detection of light from a laser beam scattered on nanoparticles by three detectors: a photodiode, an optical spectrometer and a digital photo camera. The Rayleigh-Mie theory was used as a basis for the description of the results. Two lasers with wavelengths of 446 and 661 nm were used as light sources. 2D maps of the scattered light intensity were assembled from photo camera pictures at different discharge parameters. Dependencies of the signal intensity on the O2 flow rate and wavelength are discussed. Direct measurements of particle size on the substrate were carried out by means of a scanning electron microscope in order to verify the agreement of results with the theory. Aside from nanoparticles we detected TiO2 columnar structures in the deposited samples. Crystalline structure of the samples was investigated using x-ray diffraction analysis.

Язык оригиналаАнглийский
Номер статьи265201
ЖурналJournal of Physics D: Applied Physics
Том49
Номер выпуска26
DOI
СостояниеОпубликовано - 25 мая 2016

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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