Three-axis MEMS accelerometer for structural inspection

Evgenii Sergeevich Barbin, Aleksei Nikolaevich Koleda, T. Nesterenko, S. Vtorushin

Отделение электронной инженерии

Результат исследований: Материалы для журнала › рецензирование

Аннотация

Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simulate the behavior of MEMS accelerometer by employing a finite element model and MATLAB/Simulink tools for modeling nonlinear dynamic systems.

Язык оригинала	Английский
Номер статьи	012003
Журнал	Journal of Physics: Conference Series
Том	671
Номер выпуска	1
DOI	https://doi.org/10.1088/1742-6596/671/1/012003
Состояние	Опубликовано - 18 янв 2016
Событие	3rd All-Russian Scientific and Practical Conference on Innovations in Non-Destructive Testing, SibTest 2015 - Altai, Российская Федерация Продолжительность: 27 июл 2015 → 31 июл 2015

ASJC Scopus subject areas

Physics and Astronomy(all)

Доступ к документу

10.1088/1742-6596/671/1/012003

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