Thermal stability and transformation phenomena in magnetron sputtered Al-Cu-O films

S. Zuzjaková, P. Zeman, J. Houška, R. Čerstvý, J. Musil

Результат исследования: Материалы для журналаСтатья

2 Цитирования (Scopus)

Аннотация

The present study focuses on the effect of Cu incorporation into magnetron sputtered alumina films. The transformation phenomena in an Al-O film and Al-Cu-O films with varying Cu content (1.4-9.6 at%) were studied using differential scanning calorimetry (DSC) and X-ray diffraction in combination with ab-initio calculations. In the Al-O film, only an exothermic transformation of an as-deposited γ-Al2O3 structure into α-Al2O3 is observed. In the Al-Cu-O films an exothermic decomposition of an as-deposited metastable solid solution into α-Al2O3 and CuAl2O4 was observed with a successive endothermic decomposition of CuAl2O4. In the Al-Cu-O film with 1.4 at% Cu the α-Al2O3 phase forms at a considerably lower temperature (∼1000 °C) compared to the Al-O film (∼1150 °C). The increasing Cu content results in an increase of thermal stability of the metastable solid solution and a decrease of (i) the concentration of octahedral Al vacancies and (ii) transformation energy of this solution upon heating.

Язык оригиналаАнглийский
Страницы (с... по...)6020-6029
Количество страниц10
ЖурналCeramics International
Том41
Номер выпуска4
DOI
Статус публикацииОпубликовано - 1 мая 2015

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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