The paper considers a plasma source based on a low-pressure (≈1 Pa) high-current (up to 450 A) non-self-sustained glow discharge with a hollow cathode of volume ≈0.2 m3. The research data are presented on the ignition stability of the discharge, on its main parameters, and on the radial and azimuthal plasma inhomogeneity varying with the pressure, discharge voltage and current, and anode-to-cathode area ratio at a plasma density of ≈1018 m-3 and an ionization degree of ≈1%. The beam plasma formations synthesized in such an electrode system of non-self-sustained glow discharge with a hollow cathode are interesting both from a scientific and technical point of view.
ASJC Scopus subject areas
- Condensed Matter Physics