TY - GEN
T1 - The role of energy in formation of sputtered nanocomposite films
AU - Musil, J.
AU - Šůna, J.
PY - 2005/12/1
Y1 - 2005/12/1
N2 - The paper analysis the effect of energy E, delivered to the growing film by bombarding ions and fast condensing atoms, on its (i) structure, (ii) elemental and phase composition and (iii) physical properties. A special attention is devoted to the macrostress a generated in sputtered films under ion bombardment. The conditions under which thick, low-stress sputtered films can be produced are given.
AB - The paper analysis the effect of energy E, delivered to the growing film by bombarding ions and fast condensing atoms, on its (i) structure, (ii) elemental and phase composition and (iii) physical properties. A special attention is devoted to the macrostress a generated in sputtered films under ion bombardment. The conditions under which thick, low-stress sputtered films can be produced are given.
KW - Fast condensing atoms
KW - Ion bombardment
KW - Macrostress
KW - Sputtering
KW - Structure
UR - http://www.scopus.com/inward/record.url?scp=33745489474&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33745489474&partnerID=8YFLogxK
U2 - 10.4028/0-87849-980-6.291
DO - 10.4028/0-87849-980-6.291
M3 - Conference contribution
AN - SCOPUS:33745489474
SN - 0878499806
SN - 9780878499809
T3 - Materials Science Forum
SP - 291
EP - 296
BT - New Frontiers of Processing and Eng. in Advanced Materials - Proc. of the Int. Conf. on New Frontiers of Process Science and Eng. in Advanced Materials, PSEA' 04 - The 14th Iketani Conference
T2 - International Conference on New Frontiers of Process Science and Engineering in Advanced Materials, PSEA' 04
Y2 - 24 November 2004 through 26 November 2004
ER -