The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

1 Цитирования (Scopus)

Аннотация

Aluminum nitride is widely-used material for semiconductor devices and ceramics production. Despite the large number of known ways to obtain AlN powder, the problem of synthesizing high-purity and nanosized product is still urgent. This paper shows results on plasma dynamic synthesis of aluminum nitride using system based coaxial magneto plasma accelerator. The influence of using gaseous or solid precursors on such characteristics of the final product as phase content and particle size distribution was investigated. According to X- Ray diffractometry AlN phase content is increased in the case of use of solid nitrogen- containing precursor (melamine) in comparison with the use of gaseous nitrogen. The particle sizes distribution histograms are built in accordance with the data of bright-field TEM-images and shown in this paper. The most of particles are less than 100 nm in both experiment but there are some differences, depended on the precursor type, that are also described.

Язык оригиналаАнглийский
Название основной публикацииIOP Conference Series: Materials Science and Engineering
ИздательInstitute of Physics Publishing
Том93
Издание1
DOI
СостояниеОпубликовано - 13 окт 2015
Событие21st International Conference for Students and Young Scientists: Modern Technique and Technologies, MTT 2015 - Tomsk, Российская Федерация
Продолжительность: 5 окт 20159 окт 2015

Другое

Другое21st International Conference for Students and Young Scientists: Modern Technique and Technologies, MTT 2015
СтранаРоссийская Федерация
ГородTomsk
Период5.10.159.10.15

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

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  • Цитировать

    Shanenkov, I., Sivkov, A., Ivashutenko, A., & Shanenkova, Y. (2015). The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors. В IOP Conference Series: Materials Science and Engineering (1 ред., Том 93). [012051] Institute of Physics Publishing. https://doi.org/10.1088/1757-899X/93/1/012051