We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge. The discharge burning time was varied from 0.5 to 10 ms with proportional pauses. The dependences of deposited diamond films growth rate on the durations of the discharge burning and pauses are presented. The mutual influence of two plasma filaments on each other and onto the substrate has unequivocally established. Raman spectroscopy, X-ray diffractometry and SEM were used for identification of phase composition and microstructure of deposited films. Implementation simplicity and reliability of the proposed discharge system may find application in diamond film deposition industries.

Язык оригиналаАнглийский
Номер статьи012118
ЖурналJournal of Physics: Conference Series
Номер выпуска1
СостояниеОпубликовано - 4 мая 2017

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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