The influence of some model parameters on the impurity distribution implanted into substrate surface

Результат исследования: Материалы для журналаСтатья

Аннотация

The model for description of the initial stage of ion implantation into the surface layer of the metal is presented. The interdependence of embedded impurity concentration and deformations arising from the impact of particles on the surface is investigated. The model takes into account the particle diffusion, the finite time of mass flux relaxation; the stress appearance due to a composition change of the surface layer and a mass transfer phenomenon under a stress gradient action. It is established that the interaction of mechanical waves and concentration leads to a distribution of concentration not corresponding to a pure diffusion process. The examples of coupled problems solution for different sets of model parameters are presented.

Язык оригиналаАнглийский
Артикульный номер012085
ЖурналIOP Conference Series: Materials Science and Engineering
Том124
Номер выпуска1
DOI
Статус публикацииОпубликовано - 2 июн 2016

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ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

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