TY - JOUR
T1 - The influence of repetitively pulsed plasma immersion low energy ion implantation on TiN coating formation and properties
AU - Sivin, D. O.
AU - Anan'in, Peter Semenovich
AU - Dektyarev, S. V.
AU - Ryabchikov, A. I.
AU - Shevelev, A. E.
PY - 2017/5/4
Y1 - 2017/5/4
N2 - Application of high frequency short pulse plasma immersion low energy ion implantation for titanium nitride coating deposition using vacuum arc metal plasma and hot-cathode gas-discharge plasma on R6M5 alloy was investigated. Implementation of negative repetitively pulsed bias with bias amplitude 2 kV, pulse duration 5 μs and pulse frequency 105 Hz leads to 6.2-fold decrease of vacuum arc macroparticle surface density for macroparticles with diameter less than 0.5 μm. Ion sputtering due coating deposition reduces the production rate approximately by 30%. It was found that with bias amplitude range from 1.1 to 1.4 kV and pulse duration 5 μs yields to formation of coatings with local hardness up to 40 GPa. This paper presents the results of experimental studies of adhesion strength, tribological properties and surface morphology of deposited TiN coatings.
AB - Application of high frequency short pulse plasma immersion low energy ion implantation for titanium nitride coating deposition using vacuum arc metal plasma and hot-cathode gas-discharge plasma on R6M5 alloy was investigated. Implementation of negative repetitively pulsed bias with bias amplitude 2 kV, pulse duration 5 μs and pulse frequency 105 Hz leads to 6.2-fold decrease of vacuum arc macroparticle surface density for macroparticles with diameter less than 0.5 μm. Ion sputtering due coating deposition reduces the production rate approximately by 30%. It was found that with bias amplitude range from 1.1 to 1.4 kV and pulse duration 5 μs yields to formation of coatings with local hardness up to 40 GPa. This paper presents the results of experimental studies of adhesion strength, tribological properties and surface morphology of deposited TiN coatings.
UR - http://www.scopus.com/inward/record.url?scp=85019994328&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85019994328&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/830/1/012103
DO - 10.1088/1742-6596/830/1/012103
M3 - Article
AN - SCOPUS:85019994328
VL - 830
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012103
T2 - 5th International Congress on Energy Fluxes and Radiation Effects 2016, EFRE 2016
Y2 - 2 October 2016 through 7 October 2016
ER -