The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings

Artur Shugurov, Alexey Panin, Alexandr Akulinkin, Artur Kasterov, Mark Kalashnikov, Evgenii Kuzminov

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Выдержка

The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.

Язык оригиналаАнглийский
Название основной публикацииProceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures
РедакторыVasily M. Fomin, Victor E. Panin, Sergey G. Psakhie
ИздательAmerican Institute of Physics Inc.
Том2051
ISBN (электронное издание)9780735417779
DOI
СостояниеОпубликовано - 12 дек 2018
СобытиеInternational Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018 - Tomsk, Российская Федерация
Продолжительность: 1 окт 20185 окт 2018

Конференция

КонференцияInternational Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018
СтранаРоссийская Федерация
ГородTomsk
Период1.10.185.10.18

Отпечаток

mechanical properties
coatings
microstructure
partial pressure
nitrogen
nanoindentation
magnetron sputtering
titanium
scanning electron microscopy
temperature
diffraction
x rays

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Цитировать

Shugurov, A., Panin, A., Akulinkin, A., Kasterov, A., Kalashnikov, M., & Kuzminov, E. (2018). The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. В V. M. Fomin, V. E. Panin, & S. G. Psakhie (Ред.), Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures (Том 2051). [020283] American Institute of Physics Inc.. https://doi.org/10.1063/1.5083526

The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. / Shugurov, Artur; Panin, Alexey; Akulinkin, Alexandr; Kasterov, Artur; Kalashnikov, Mark; Kuzminov, Evgenii.

Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. ред. / Vasily M. Fomin; Victor E. Panin; Sergey G. Psakhie. Том 2051 American Institute of Physics Inc., 2018. 020283.

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Shugurov, A, Panin, A, Akulinkin, A, Kasterov, A, Kalashnikov, M & Kuzminov, E 2018, The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. в VM Fomin, VE Panin & SG Psakhie (ред.), Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. том. 2051, 020283, American Institute of Physics Inc., International Symposium on Hierarchical Materials: Development and Applications for New Technologies and Reliable Structures 2018, Tomsk, Российская Федерация, 1.10.18. https://doi.org/10.1063/1.5083526
Shugurov A, Panin A, Akulinkin A, Kasterov A, Kalashnikov M, Kuzminov E. The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. В Fomin VM, Panin VE, Psakhie SG, редакторы, Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. Том 2051. American Institute of Physics Inc. 2018. 020283 https://doi.org/10.1063/1.5083526
Shugurov, Artur ; Panin, Alexey ; Akulinkin, Alexandr ; Kasterov, Artur ; Kalashnikov, Mark ; Kuzminov, Evgenii. / The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings. Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures. редактор / Vasily M. Fomin ; Victor E. Panin ; Sergey G. Psakhie. Том 2051 American Institute of Physics Inc., 2018.
@inproceedings{5bbd5c38c16a4b519e5490611888fe59,
title = "The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings",
abstract = "The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.",
author = "Artur Shugurov and Alexey Panin and Alexandr Akulinkin and Artur Kasterov and Mark Kalashnikov and Evgenii Kuzminov",
year = "2018",
month = "12",
day = "12",
doi = "10.1063/1.5083526",
language = "English",
volume = "2051",
editor = "Fomin, {Vasily M.} and Panin, {Victor E.} and Psakhie, {Sergey G.}",
booktitle = "Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures",
publisher = "American Institute of Physics Inc.",

}

TY - GEN

T1 - The effect of deposition parameters on microstructure and mechanical properties of Ti-Al-Ta-N coatings

AU - Shugurov, Artur

AU - Panin, Alexey

AU - Akulinkin, Alexandr

AU - Kasterov, Artur

AU - Kalashnikov, Mark

AU - Kuzminov, Evgenii

PY - 2018/12/12

Y1 - 2018/12/12

N2 - The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.

AB - The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 1.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.

UR - http://www.scopus.com/inward/record.url?scp=85058984945&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85058984945&partnerID=8YFLogxK

U2 - 10.1063/1.5083526

DO - 10.1063/1.5083526

M3 - Conference contribution

AN - SCOPUS:85058984945

VL - 2051

BT - Proceedings of the Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures

A2 - Fomin, Vasily M.

A2 - Panin, Victor E.

A2 - Psakhie, Sergey G.

PB - American Institute of Physics Inc.

ER -