The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode

A. S. Grenadyorov, K. V. Oskomov, A. A. Solovyev, S. V. Rabotkin, N. F. Kovsharov

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Аннотация

Silicon-carbon coatings on silicon substrates were deposited in plasma based nonselfsustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa.

Язык оригиналаАнглийский
Название основной публикацииHigh Technology
Подзаголовок основной публикацииResearch and Applications, 2015
ИздательTrans Tech Publications Ltd
Страницы643-647
Число страниц5
ISBN (печатное издание)9783038357087
DOI
СостояниеОпубликовано - 1 янв 2016
Событие4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 - Tomsk, Российская Федерация
Продолжительность: 21 апр 201524 апр 2015

Серия публикаций

НазваниеKey Engineering Materials
Том685
ISSN (печатное издание)1013-9826

Конференция

Конференция4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015
СтранаРоссийская Федерация
ГородTomsk
Период21.4.1524.4.15

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Цитировать

    Grenadyorov, A. S., Oskomov, K. V., Solovyev, A. A., Rabotkin, S. V., & Kovsharov, N. F. (2016). The deposition of silicon-carbon coatings in plasma based nonself-sustained arc discharge with heated cathode. В High Technology: Research and Applications, 2015 (стр. 643-647). (Key Engineering Materials; Том 685). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.685.643