Temperature error compensation in two-component microelectromechanical gyroscope

Результат исследований: Материалы для журналаСтатья

10 Цитирования (Scopus)


This paper presents the design and simulation of a microelectromechanical gyroscope that simultaneously determines two components of angular velocity. In this device, the silicon sensor is started by an electrostatic actuator to perform a linear harmonic motion at a controlled speed. The movable masses of the sensor move in two directions, orthogonal to the primary vibrations of the sensor under the action of Coriolis forces. This paper considers how temperature influences eigenfrequencies and informative vibrational magnitudes of the micromechanical angular velocity sensor. The parameters that have the greatest impact on the sensor output behavior are determined by a finite-element analysis method. Techniques to stabilize vibration eigenfrequencies of the sensing element are suggested.

Язык оригиналаАнглийский
Номер статьи6881628
Страницы (с-по)1598-1605
Число страниц8
ЖурналIEEE Transactions on Components, Packaging and Manufacturing Technology
Номер выпуска10
СостояниеОпубликовано - 1 окт 2014

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Industrial and Manufacturing Engineering

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