Surface Modification of Corundum Ceramics by Argon Ion Beam

S. A. Ghyngazov, V. Kostenko, V. V. Ovchinnikov, N. V. Gushchina, F. F. Makhinko

Результат исследований: Материалы для журналаСтатья

Выдержка

Abstract: The mechanical properties of near-surface layers of aluminum oxide ceramic treated with a continuous ion beam of argon are investigated. The phase and structural changes of the modified near-surface layers were analyzed by X-ray diffraction analysis and scanning electron microscopy, respectively. Samples for research were made from corundum plates used in microelectronics. Ion processing was carried out using an ILM-1 ion implanter equipped with a Pulsar-1M ion source based on a low-pressure glow discharge with a cold hollow cathode. Argon ions with energy of 30 keV and ion current density j = 300 μA/cm2 were used for the irradiation. Two irradiation modes with the fluences of 1016 and 1017 cm–2 were implemented. It was established that the ion treatment promotes the manifestation of the initial grain structure of a sample and increases the mechanical characteristics (modulus of elasticity and nanohardness) of near-surface layers of samples. According to the X-ray diffraction data, after the action of an ion beam, there is a decrease in the size of the coherent scattering region with respect to the initial state. The irradiation leads to an increase in the values of crystal lattice microstrains. Possible mechanisms of modifying the ceramic surface are discussed.

Язык оригиналаАнглийский
Страницы (с-по)438-444
Число страниц7
ЖурналInorganic Materials: Applied Research
Том10
Номер выпуска2
DOI
СостояниеОпубликовано - 1 мар 2019

Отпечаток

Corundum
Aluminum Oxide
Argon
Ion beams
Surface treatment
Ions
Irradiation
Nanohardness
Coherent scattering
DEAE-Dextran
Crystal microstructure
Glow discharges
Ion sources
Microelectronics
Crystal lattices
X ray diffraction analysis
Cathodes
Current density
Elastic moduli
Aluminum

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

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Surface Modification of Corundum Ceramics by Argon Ion Beam. / Ghyngazov, S. A.; Kostenko, V.; Ovchinnikov, V. V.; Gushchina, N. V.; Makhinko, F. F.

В: Inorganic Materials: Applied Research, Том 10, № 2, 01.03.2019, стр. 438-444.

Результат исследований: Материалы для журналаСтатья

Ghyngazov, S. A. ; Kostenko, V. ; Ovchinnikov, V. V. ; Gushchina, N. V. ; Makhinko, F. F. / Surface Modification of Corundum Ceramics by Argon Ion Beam. В: Inorganic Materials: Applied Research. 2019 ; Том 10, № 2. стр. 438-444.
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AU - Makhinko, F. F.

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AB - Abstract: The mechanical properties of near-surface layers of aluminum oxide ceramic treated with a continuous ion beam of argon are investigated. The phase and structural changes of the modified near-surface layers were analyzed by X-ray diffraction analysis and scanning electron microscopy, respectively. Samples for research were made from corundum plates used in microelectronics. Ion processing was carried out using an ILM-1 ion implanter equipped with a Pulsar-1M ion source based on a low-pressure glow discharge with a cold hollow cathode. Argon ions with energy of 30 keV and ion current density j = 300 μA/cm2 were used for the irradiation. Two irradiation modes with the fluences of 1016 and 1017 cm–2 were implemented. It was established that the ion treatment promotes the manifestation of the initial grain structure of a sample and increases the mechanical characteristics (modulus of elasticity and nanohardness) of near-surface layers of samples. According to the X-ray diffraction data, after the action of an ion beam, there is a decrease in the size of the coherent scattering region with respect to the initial state. The irradiation leads to an increase in the values of crystal lattice microstrains. Possible mechanisms of modifying the ceramic surface are discussed.

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