Structure and properties of nanocomposite Nb-Al-N films

V. I. Ivashchenko, A. D. Pogrebnjak, O. V. Sobol’, P. L. Skrynskii, V. N. Rogoz, A. A. Meilekhov, S. N. Dub, A. I. Kupchishin

Результат исследований: Материалы для журналаСтатья

7 Цитирования (Scopus)

Выдержка

Nanocomposite Nb-Al-N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbNz and B1-Nb1 − xAlxNyO1 − y, and an amorphous-like component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbNz and Nb2AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time.

Язык оригиналаАнглийский
Страницы (с-по)1642-1646
Число страниц5
ЖурналPhysics of the Solid State
Том57
Номер выпуска8
DOI
СостояниеОпубликовано - 4 авг 2015
Опубликовано для внешнего пользованияДа

Отпечаток

Magnetron sputtering
Nanocomposites
magnetron sputtering
nanocomposites
Nanohardness
oxynitrides
Reactive sputtering
substructures
Heterojunctions
hardness
Hardness
Crystalline materials
aluminum
Aluminum
aluminum oxynitride

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Цитировать

Ivashchenko, V. I., Pogrebnjak, A. D., Sobol’, O. V., Skrynskii, P. L., Rogoz, V. N., Meilekhov, A. A., ... Kupchishin, A. I. (2015). Structure and properties of nanocomposite Nb-Al-N films. Physics of the Solid State, 57(8), 1642-1646. https://doi.org/10.1134/S1063783415080089

Structure and properties of nanocomposite Nb-Al-N films. / Ivashchenko, V. I.; Pogrebnjak, A. D.; Sobol’, O. V.; Skrynskii, P. L.; Rogoz, V. N.; Meilekhov, A. A.; Dub, S. N.; Kupchishin, A. I.

В: Physics of the Solid State, Том 57, № 8, 04.08.2015, стр. 1642-1646.

Результат исследований: Материалы для журналаСтатья

Ivashchenko, VI, Pogrebnjak, AD, Sobol’, OV, Skrynskii, PL, Rogoz, VN, Meilekhov, AA, Dub, SN & Kupchishin, AI 2015, 'Structure and properties of nanocomposite Nb-Al-N films', Physics of the Solid State, том. 57, № 8, стр. 1642-1646. https://doi.org/10.1134/S1063783415080089
Ivashchenko VI, Pogrebnjak AD, Sobol’ OV, Skrynskii PL, Rogoz VN, Meilekhov AA и соавт. Structure and properties of nanocomposite Nb-Al-N films. Physics of the Solid State. 2015 Авг. 4;57(8):1642-1646. https://doi.org/10.1134/S1063783415080089
Ivashchenko, V. I. ; Pogrebnjak, A. D. ; Sobol’, O. V. ; Skrynskii, P. L. ; Rogoz, V. N. ; Meilekhov, A. A. ; Dub, S. N. ; Kupchishin, A. I. / Structure and properties of nanocomposite Nb-Al-N films. В: Physics of the Solid State. 2015 ; Том 57, № 8. стр. 1642-1646.
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AU - Ivashchenko, V. I.

AU - Pogrebnjak, A. D.

AU - Sobol’, O. V.

AU - Skrynskii, P. L.

AU - Rogoz, V. N.

AU - Meilekhov, A. A.

AU - Dub, S. N.

AU - Kupchishin, A. I.

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AB - Nanocomposite Nb-Al-N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbNz and B1-Nb1 − xAlxNyO1 − y, and an amorphous-like component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbNz and Nb2AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time.

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