Structure and phase analysis of fine powder materials produced by target sputtering with power pulsed beam

Yu F. Ivanov, G. E. Remnev, V. A. Makeev

Результат исследований: Материалы для журналаСтатьярецензирование

4 Цитирования (Scopus)

Аннотация

Using the TEM methods, the morphology, granulometry, angle distribution, defect structure and phase composition of powder materials synthesized by metal targets sputtering with ion beam have been investigated. Dependencies of average size, density and volume portion of powder fraction on angle divergence were established. The possible mechanisms of formation of powder particles of different shape are discussed.

Язык оригиналаАнглийский
Страницы (с-по)62-67
Число страниц6
ЖурналFizika i Khimiya Obrabotki Materialov
Номер выпуска3
СостояниеОпубликовано - 2001

ASJC Scopus subject areas

  • Materials Science(all)

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