The elemental, phase composition, morphology and structural state of the ion-alloyed surface layers of titanium implanted by the Al ions have been investigated. Ion implantation of the Al ions into titanium was carried out using the plasma-flow, vacuum-arc ion source 'Raduga-5.' It was found out that increase of the Al ions dose from 2.2 × 1017ion/cm2 to 2.2 × 1018 ion/cm2 led to increasing the ion-alloyed layers thickness from 400 to 2600 nm. It was established that the fine dispersed equilibrium intermetallic phases Ti3Al, TiAl and the solid solution of aluminium in titanium were formed in the modified layers. The solid solution composition was variable as the function of depth. The agglomeration of the nanoscale particles occurred above the dose 6.2 × 1017 ion/cm2. The depending of the structure state and phase composition of the implanted titanium layers on the implantation condition and regimes was considered.
|Журнал||Poverkhnost Rentgenovskie Sinkhronnye i Nejtronnye Issledovaniya|
|Состояние||Опубликовано - 2005|
ASJC Scopus subject areas
- Mechanical Engineering