Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation — National Research Tomsk Polytechnic University

Аннотация

TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O / Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °C for 20-120 min leads to a change in the structural-phase state. The untransformable t' phase appears at a temperature of 900 °C after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further.

Язык оригинала	Английский
Название основной публикации	Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019
Редакторы	Victor E. Panin, Sergey G. Psakhie, Vasily M. Fomin
Издатель	American Institute of Physics Inc.
ISBN (электронное издание)	9780735419124
DOI	https://doi.org/10.1063/1.5131963
Состояние	Опубликовано - 19 ноя 2019
Событие	International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019 - Tomsk, Российская Федерация Продолжительность: 1 окт 2019 → 5 окт 2019

Серия публикаций

Название	AIP Conference Proceedings
Том	2167
ISSN (печатное издание)	0094-243X
ISSN (электронное издание)	1551-7616

Конференция

Конференция	International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019
Страна	Российская Федерация
Город	Tomsk
Период	1.10.19 → 5.10.19

ASJC Scopus subject areas

Physics and Astronomy(all)

Доступ к документу

10.1063/1.5131963

Fingerprint Подробные сведения о темах исследования «Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation». Вместе они формируют уникальный семантический отпечаток (fingerprint).

Цитировать

Fedorischeva, M. V., Nikonenko, A. V., Kalashnikov, M. P., Bozhko, I. A., & Sergeev, V. P. (2019). Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation. В V. E. Panin, S. G. Psakhie, & V. M. Fomin (Ред.), Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019 [020096] (AIP Conference Proceedings; Том 2167). American Institute of Physics Inc.. https://doi.org/10.1063/1.5131963

Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation. / Fedorischeva, M. V.; Nikonenko, A. V.; Kalashnikov, M. P.; Bozhko, I. A.; Sergeev, V. P.

Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019. ред. / Victor E. Panin; Sergey G. Psakhie; Vasily M. Fomin. American Institute of Physics Inc., 2019. 020096 (AIP Conference Proceedings; Том 2167).

Результат исследований: Материалы для книги/типы отчетов › Материалы для конференции

Fedorischeva, MV, Nikonenko, AV, Kalashnikov, MP , Bozhko, IA & Sergeev, VP 2019, Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation. в VE Panin, SG Psakhie & VM Fomin (ред.), Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019., 020096, AIP Conference Proceedings, том. 2167, American Institute of Physics Inc., International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019, Tomsk, Российская Федерация, 1.10.19. https://doi.org/10.1063/1.5131963

Fedorischeva MV, Nikonenko AV, Kalashnikov MP , Bozhko IA , Sergeev VP. Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation. В Panin VE, Psakhie SG, Fomin VM, редакторы, Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019. American Institute of Physics Inc. 2019. 020096. (AIP Conference Proceedings). https://doi.org/10.1063/1.5131963

Fedorischeva, M. V. ; Nikonenko, A. V. ; Kalashnikov, M. P. ; Bozhko, I. A. ; Sergeev, V. P. / Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation. Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019. редактор / Victor E. Panin ; Sergey G. Psakhie ; Vasily M. Fomin. American Institute of Physics Inc., 2019. (AIP Conference Proceedings).

@inproceedings{629bf67f57f44732bd8b9eb35d8b62f4,

title = "Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation",

abstract = "TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O / Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °C for 20-120 min leads to a change in the structural-phase state. The untransformable t' phase appears at a temperature of 900 °C after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further.",

author = "Fedorischeva, {M. V.} and Nikonenko, {A. V.} and Kalashnikov, {M. P.} and Bozhko, {I. A.} and Sergeev, {V. P.}",

year = "2019",

month = nov,

day = "19",

doi = "10.1063/1.5131963",

language = "English",

series = "AIP Conference Proceedings",

publisher = "American Institute of Physics Inc.",

editor = "Panin, {Victor E.} and Psakhie, {Sergey G.} and Fomin, {Vasily M.}",

booktitle = "Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019",

note = "International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019 ; Conference date: 01-10-2019 Through 05-10-2019",

}

TY - GEN

T1 - Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation

AU - Fedorischeva, M. V.

AU - Nikonenko, A. V.

AU - Kalashnikov, M. P.

AU - Bozhko, I. A.

AU - Sergeev, V. P.

PY - 2019/11/19

Y1 - 2019/11/19

N2 - TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O / Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °C for 20-120 min leads to a change in the structural-phase state. The untransformable t' phase appears at a temperature of 900 °C after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further.

AB - TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O / Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °C for 20-120 min leads to a change in the structural-phase state. The untransformable t' phase appears at a temperature of 900 °C after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further.

UR - http://www.scopus.com/inward/record.url?scp=85075775728&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85075775728&partnerID=8YFLogxK

U2 - 10.1063/1.5131963

DO - 10.1063/1.5131963

M3 - Conference contribution

AN - SCOPUS:85075775728

T3 - AIP Conference Proceedings

BT - Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019

A2 - Panin, Victor E.

A2 - Psakhie, Sergey G.

A2 - Fomin, Vasily M.

PB - American Institute of Physics Inc.

T2 - International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019

Y2 - 1 October 2019 through 5 October 2019

ER -