Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation

M. V. Fedorischeva, A. V. Nikonenko, M. P. Kalashnikov, I. A. Bozhko, V. P. Sergeev

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Аннотация

TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O / Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °C for 20-120 min leads to a change in the structural-phase state. The untransformable t' phase appears at a temperature of 900 °C after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further.

Язык оригиналаАнглийский
Название основной публикацииProceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019
РедакторыVictor E. Panin, Sergey G. Psakhie, Vasily M. Fomin
ИздательAmerican Institute of Physics Inc.
ISBN (электронное издание)9780735419124
DOI
СостояниеОпубликовано - 19 ноя 2019
СобытиеInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019 - Tomsk, Российская Федерация
Продолжительность: 1 окт 20195 окт 2019

Серия публикаций

НазваниеAIP Conference Proceedings
Том2167
ISSN (печатное издание)0094-243X
ISSN (электронное издание)1551-7616

Конференция

КонференцияInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019
СтранаРоссийская Федерация
ГородTomsk
Период1.10.195.10.19

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Цитировать

    Fedorischeva, M. V., Nikonenko, A. V., Kalashnikov, M. P., Bozhko, I. A., & Sergeev, V. P. (2019). Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation. В V. E. Panin, S. G. Psakhie, & V. M. Fomin (Ред.), Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019 [020096] (AIP Conference Proceedings; Том 2167). American Institute of Physics Inc.. https://doi.org/10.1063/1.5131963