Some regularities of modification of the real silicon surface by electrochemically activated solutions of sulfuric acid

N. N. Nikitenkov, E. E. Chernova, Yu A. Karbainov, N. M. Markova, T. I. Khakhanina

Результат исследований: Материалы для журналаСтатья

Аннотация

The effect of electrochemically activated solutions of sulfuric acid on the state of the real surface of technological silicon plates is studied. It is shown that the most intense change in the zone of surface states occurs for the first 10 min of the interaction. The authors believe that the treatment of the silicon surface by chemically activated solutions of sulfuric acid results in chemical modification of the real surface, but not in deep cleaning.

Язык оригиналаАнглийский
Страницы (с-по)1275-1280
Число страниц6
ЖурналSurface Investigation X-Ray, Synchrotron and Neutron Techniques
Том12
Номер выпуска11
СостояниеОпубликовано - 1997

ASJC Scopus subject areas

  • Surfaces and Interfaces

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