Size effect in AlN/SiN multilayered films irradiated with helium and argon ions

V. V. Uglov, N. T. Kvasov, G. E. Remnev, V. I. Shymanski, E. L. Korenevski, S. V. Zlotski, G. Abadias, J. O'Connel, A. van Vuuren

Результат исследований: Материалы для журналаСтатьярецензирование

11 Цитирования (Scopus)


The results of microstructure and phase composition of the AlN/SiNx multilayered films after the irradiation with helium and argon ions are presented. The multilayered films with alternating nanocrystalline (nc-AlN) and amorphous (a-SiNx) phases with thicknesses from 2 to 10 nm were obtained by reactive magnetron sputtering. X-ray diffraction results showed the dependence of the crystal lattice parameters of the nc-AlN phase on the thickness which is explained by size affect. After the irradiation with helium (30 keV) and argon (180 keV) ions the radiation-induced point defects as well as their clusters are produced in the films and mainly localized in the amorphous a-SiNx layers. It is of the consequence of enhanced implanted ions migration towards the a-SiNx layers and bubbles formation, as revealed by high-resolution transmission electron microscopy. The average size of the bubbles is 2.0–2.4 nm and grows up to 4–5 nm after the post-irradiation vacuum (800 °C) annealing. The amorphous a-SiNx layers are believed to serve as sinks for radiation-induced defects.

Язык оригиналаАнглийский
Страницы (с-по)228-235
Число страниц8
ЖурналNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
СостояниеОпубликовано - 15 ноя 2018

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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