Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges

Victor F. Tarasenko, Evgenii B. Chernov, Michail V. Erofeev, Alexei N. Panchenko, Victor S. Skakun, Eduard A. Sosnin

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

3 Цитирования (Scopus)

Аннотация

In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.

Язык оригиналаАнглийский
Название основной публикацииProceedings of SPIE - The International Society for Optical Engineering
ИздательSociety of Photo-Optical Instrumentation Engineers
Страницы425-432
Число страниц8
Том3618
СостояниеОпубликовано - 1999
СобытиеProceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV) - San Jose, CA, USA
Продолжительность: 25 янв 199927 янв 1999

Другое

ДругоеProceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV)
ГородSan Jose, CA, USA
Период25.1.9927.1.99

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Fingerprint Подробные сведения о темах исследования «Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges». Вместе они формируют уникальный семантический отпечаток (fingerprint).

Цитировать