Relationship between mechanical properties and coefficient of friction of sputtered a-C/Cu composite thin films

J. Musil, M. Louda, Z. Soukup, M. Kubásek

Результат исследований: Материалы для журналаСтатья

37 Цитирования (Scopus)

Выдержка

The article reports on properties of a-C films containing different amount of Cu. Films were sputtered by unbalanced magnetron from a graphite target with Cu fixing ring in argon under different deposition conditions. Relationships between the structure, mechanical properties, macrostress σ and coefficient of friction (CoF) μ of a-C/Cu films sputtered on Si substrates were investigated in detail. Besides, a special attention was concentrated on investigation of the effect of a deposition rate aD of the a-C/Cu film on its hardness H and macrostress σ. Four main issues were found: (1) the addition of Cu into a-C film strongly influences its structure and mechanical properties, i.e. the hardness H, effective Young's modulus E* macrostress σ and CoF, and makes it possible to form electrically conductive films; here E* = E / (1 - ν2), E is the Young's modulus, and ν is the Poisson's ratio, (2) the hardness H and compressive macrostress σ of the a-C/Cu film decrease with increasing aD due to decreasing of total energy ET delivered to the film during its growth, (3) hard a-C/Cu films with low value of CoF (μ ≈ 0.1) can be sputtered at high deposition rates aD ranging from ~ 10 to ~ 80 nm/min, and (4) CoF decreases with increasing (i) hardness H and (ii) resistance of film to plastic deformation characterized by the ratio H3/E*2 but only in the case when compressive macrostress σ is low.

Язык оригиналаАнглийский
Страницы (с-по)1905-1911
Число страниц7
ЖурналDiamond and Related Materials
Том17
Номер выпуска11
DOI
СостояниеОпубликовано - 1 ноя 2008

Отпечаток

Composite films
coefficient of friction
mechanical properties
Friction
Thin films
Mechanical properties
composite materials
thin films
Hardness
hardness
Deposition rates
Elastic moduli
modulus of elasticity
Conductive films
Graphite
Argon
Poisson ratio
fixing
Plastic deformation
plastic deformation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering

Цитировать

Relationship between mechanical properties and coefficient of friction of sputtered a-C/Cu composite thin films. / Musil, J.; Louda, M.; Soukup, Z.; Kubásek, M.

В: Diamond and Related Materials, Том 17, № 11, 01.11.2008, стр. 1905-1911.

Результат исследований: Материалы для журналаСтатья

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