Regimes of energy input in the pseudospark discharge in the sources of EUV radiation

Yu D. Korolev, O. B. Frants, V. G. Geyman, R. V. Ivashov, N. V. Landl, I. A. Shemyakin

    Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

    1 цитирование (Scopus)

    Выдержка

    The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.

    Язык оригиналаАнглийский
    Название основной публикацииBEAMS 2002 - 14th International Conference on High-Power Particle Beams
    Страницы149-152
    Число страниц4
    Том2
    СостояниеОпубликовано - 2002
    Событие14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 - Albuquerque, NM, Соединенные Штаты Америки
    Продолжительность: 23 июн 200228 июн 2002

    Другое

    Другое14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002
    СтранаСоединенные Штаты Америки
    ГородAlbuquerque, NM
    Период23.6.0228.6.02

    Отпечаток

    magnetic compression
    glow discharges
    plasma jets
    electron energy
    radiation
    energy

    ASJC Scopus subject areas

    • Nuclear and High Energy Physics

    Цитировать

    Korolev, Y. D., Frants, O. B., Geyman, V. G., Ivashov, R. V., Landl, N. V., & Shemyakin, I. A. (2002). Regimes of energy input in the pseudospark discharge in the sources of EUV radiation. В BEAMS 2002 - 14th International Conference on High-Power Particle Beams (Том 2, стр. 149-152). [6219532]

    Regimes of energy input in the pseudospark discharge in the sources of EUV radiation. / Korolev, Yu D.; Frants, O. B.; Geyman, V. G.; Ivashov, R. V.; Landl, N. V.; Shemyakin, I. A.

    BEAMS 2002 - 14th International Conference on High-Power Particle Beams. Том 2 2002. стр. 149-152 6219532.

    Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

    Korolev, YD, Frants, OB, Geyman, VG, Ivashov, RV, Landl, NV & Shemyakin, IA 2002, Regimes of energy input in the pseudospark discharge in the sources of EUV radiation. в BEAMS 2002 - 14th International Conference on High-Power Particle Beams. том. 2, 6219532, стр. 149-152, 14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002, Albuquerque, NM, Соединенные Штаты Америки, 23.6.02.
    Korolev YD, Frants OB, Geyman VG, Ivashov RV, Landl NV, Shemyakin IA. Regimes of energy input in the pseudospark discharge in the sources of EUV radiation. В BEAMS 2002 - 14th International Conference on High-Power Particle Beams. Том 2. 2002. стр. 149-152. 6219532
    Korolev, Yu D. ; Frants, O. B. ; Geyman, V. G. ; Ivashov, R. V. ; Landl, N. V. ; Shemyakin, I. A. / Regimes of energy input in the pseudospark discharge in the sources of EUV radiation. BEAMS 2002 - 14th International Conference on High-Power Particle Beams. Том 2 2002. стр. 149-152
    @inproceedings{b1fd3eb00d994b8ead50e99304493f05,
    title = "Regimes of energy input in the pseudospark discharge in the sources of EUV radiation",
    abstract = "The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.",
    author = "Korolev, {Yu D.} and Frants, {O. B.} and Geyman, {V. G.} and Ivashov, {R. V.} and Landl, {N. V.} and Shemyakin, {I. A.}",
    year = "2002",
    language = "English",
    isbn = "9780735401075",
    volume = "2",
    pages = "149--152",
    booktitle = "BEAMS 2002 - 14th International Conference on High-Power Particle Beams",

    }

    TY - GEN

    T1 - Regimes of energy input in the pseudospark discharge in the sources of EUV radiation

    AU - Korolev, Yu D.

    AU - Frants, O. B.

    AU - Geyman, V. G.

    AU - Ivashov, R. V.

    AU - Landl, N. V.

    AU - Shemyakin, I. A.

    PY - 2002

    Y1 - 2002

    N2 - The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.

    AB - The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.

    UR - http://www.scopus.com/inward/record.url?scp=84865040439&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84865040439&partnerID=8YFLogxK

    M3 - Conference contribution

    AN - SCOPUS:84865040439

    SN - 9780735401075

    VL - 2

    SP - 149

    EP - 152

    BT - BEAMS 2002 - 14th International Conference on High-Power Particle Beams

    ER -