Reducing the number of craters on quartz glass surface suffering high-velocity impacts of microparticles by application of SiAlN and TaN protective films

V. P. Sergeev, M. P. Kalashnikov, O. V. Sergeev, A. V. Voronov, V. V. Neyfeld, Yu N. Paraev

Результат исследований: Материалы для журналарецензирование

Аннотация

On the quartz glass specimens, visually transparent single-layer SiAlN and two-layer SiAlN/TaN films were applied to compare their protective properties against shock impact of high-velocity (5-8 km/s) iron microparticles. The tests performed using a two-stage light-gas gun have shown that the most effective coatings are two-layer films. The structure, optical and mechanical properties of the films were determined.

Язык оригиналаАнглийский
Номер статьи012028
ЖурналJournal of Physics: Conference Series
Том1799
Номер выпуска1
DOI
СостояниеОпубликовано - 11 мар 2021
Событие27th International Conference on Vacuum Technique and Technology, VTT 2020 - Saint Petersburg, Virtual, Российская Федерация
Продолжительность: 27 окт 202029 окт 2020

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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