Properties of Nanocomposite Nickel-Carbon Films Deposited by Magnetron Sputtering

A. S. Grenadyorov, K. V. Oskomov, A. A. Solov’ev, S. V. Rabotkin, A. N. Zakharov, V. A. Semenov, V. O. Oskirko, Yu I. Yelgin, O. S. Korneva

Результат исследований: Материалы для журналаСтатья

Выдержка

The method of magnetron sputtering was used to produce a-C and a-C:Ni films on substrates of monocrystalline silicon and thermoelectric material of n-type ((Bi2Te3)0.94(Bi2Se3)0.06) and p-type ((Bi2Te3)0.20(Sb2Te3)0.80) conductivity. The authors studied the effect of Ni concentration on specific electric resistance, hardness and adhesion of the produced films. It was demonstrated that specific resistance of a-C films deposited by graphite target sputtering when supplying high bias voltage onto the substrate can be reduced by increasing the share of graphitized carbon. Adding Ni to such films allows additionally reducing their specific resistance. The increase in Ni content is accompanied with the decrease in hardness and adhesion of a-C:Ni films. The acquired values of specific electric resistance and adhesion of a-C:Ni films to thermoelectric materials allow using them as barrier anti-diffusion coatings of thermoelectric modules.

Язык оригиналаАнглийский
Страницы (с-по)1285-1290
Число страниц6
ЖурналRussian Physics Journal
Том60
Номер выпуска8
DOI
СостояниеОпубликовано - 1 дек 2017

Отпечаток

magnetron sputtering
nanocomposites
nickel
carbon
adhesion
thermoelectric materials
hardness
supplying
graphite
modules
sputtering
coatings
conductivity
electric potential
silicon

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Цитировать

Properties of Nanocomposite Nickel-Carbon Films Deposited by Magnetron Sputtering. / Grenadyorov, A. S.; Oskomov, K. V.; Solov’ev, A. A.; Rabotkin, S. V.; Zakharov, A. N.; Semenov, V. A.; Oskirko, V. O.; Yelgin, Yu I.; Korneva, O. S.

В: Russian Physics Journal, Том 60, № 8, 01.12.2017, стр. 1285-1290.

Результат исследований: Материалы для журналаСтатья

Grenadyorov, AS, Oskomov, KV, Solov’ev, AA, Rabotkin, SV, Zakharov, AN, Semenov, VA, Oskirko, VO, Yelgin, YI & Korneva, OS 2017, 'Properties of Nanocomposite Nickel-Carbon Films Deposited by Magnetron Sputtering', Russian Physics Journal, том. 60, № 8, стр. 1285-1290. https://doi.org/10.1007/s11182-017-1209-1
Grenadyorov AS, Oskomov KV, Solov’ev AA, Rabotkin SV, Zakharov AN, Semenov VA и соавт. Properties of Nanocomposite Nickel-Carbon Films Deposited by Magnetron Sputtering. Russian Physics Journal. 2017 Дек. 1;60(8):1285-1290. https://doi.org/10.1007/s11182-017-1209-1
Grenadyorov, A. S. ; Oskomov, K. V. ; Solov’ev, A. A. ; Rabotkin, S. V. ; Zakharov, A. N. ; Semenov, V. A. ; Oskirko, V. O. ; Yelgin, Yu I. ; Korneva, O. S. / Properties of Nanocomposite Nickel-Carbon Films Deposited by Magnetron Sputtering. В: Russian Physics Journal. 2017 ; Том 60, № 8. стр. 1285-1290.
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