Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering

A. N. Zakharov, A. A. Solov’ev, K. V. Oskomov, V. O. Oskirko, V. A. Semenov, M. S. Syrtanov, Yu S. Bordulev

Результат исследований: Материалы для журналаСтатьярецензирование

5 Цитирования (Scopus)

Аннотация

Results of experiments on deposition of thin molybdenum films on glass substrates by high-power impulse magnetron sputtering are presented. Two high-current modes with different pulse frequencies and durations are used. Properties of the produced molybdenum films are compared with those of films produced by magnetron sputtering at a direct current. It is shown that this method allows the resistivity of molybdenum films to be decreased and their reflectance in the visible range to be increased.

Язык оригиналаАнглийский
Страницы (с-по)1336-1340
Число страниц5
ЖурналRussian Physics Journal
Том60
Номер выпуска8
DOI
СостояниеОпубликовано - 1 дек 2017

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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