Plasma physics model of the anode layer of a magnetron discharge

D. S. Rytchkov, V. P. Krivobokov, D. A. Marakassov

Результат исследования: Материалы для журналаСтатья

Аннотация

The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.

Язык оригиналаАнглийский
Страницы (с... по...)1066-1074
Количество страниц9
ЖурналRussian Physics Journal
Том45
Номер выпуска11
DOI
Статус публикацииОпубликовано - 1 янв 2002

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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