Plasma physics model of the anode layer of a magnetron discharge

D. S. Rytchkov, V. P. Krivobokov, D. A. Marakassov

Результат исследований: Материалы для журналаСтатья

Выдержка

The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.

Язык оригиналаАнглийский
Страницы (с-по)1066-1074
Число страниц9
ЖурналRussian Physics Journal
Том45
Номер выпуска11
DOI
СостояниеОпубликовано - 1 янв 2002

Отпечаток

plasma physics
anodes
electron mobility
plasma jets
magnetron sputtering
electron scattering
hydrodynamics
approximation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Цитировать

Plasma physics model of the anode layer of a magnetron discharge. / Rytchkov, D. S.; Krivobokov, V. P.; Marakassov, D. A.

В: Russian Physics Journal, Том 45, № 11, 01.01.2002, стр. 1066-1074.

Результат исследований: Материалы для журналаСтатья

Rytchkov, D. S. ; Krivobokov, V. P. ; Marakassov, D. A. / Plasma physics model of the anode layer of a magnetron discharge. В: Russian Physics Journal. 2002 ; Том 45, № 11. стр. 1066-1074.
@article{719fd1d76ca24780b37c9bca10798578,
title = "Plasma physics model of the anode layer of a magnetron discharge",
abstract = "The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.",
author = "Rytchkov, {D. S.} and Krivobokov, {V. P.} and Marakassov, {D. A.}",
year = "2002",
month = "1",
day = "1",
doi = "10.1023/A:1023391406689",
language = "English",
volume = "45",
pages = "1066--1074",
journal = "Russian Physics Journal",
issn = "1064-8887",
publisher = "Consultants Bureau",
number = "11",

}

TY - JOUR

T1 - Plasma physics model of the anode layer of a magnetron discharge

AU - Rytchkov, D. S.

AU - Krivobokov, V. P.

AU - Marakassov, D. A.

PY - 2002/1/1

Y1 - 2002/1/1

N2 - The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.

AB - The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.

UR - http://www.scopus.com/inward/record.url?scp=52649154640&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=52649154640&partnerID=8YFLogxK

U2 - 10.1023/A:1023391406689

DO - 10.1023/A:1023391406689

M3 - Article

AN - SCOPUS:52649154640

VL - 45

SP - 1066

EP - 1074

JO - Russian Physics Journal

JF - Russian Physics Journal

SN - 1064-8887

IS - 11

ER -