4 Цитирования (Scopus)

Аннотация

The symbiosis of plasma-immersion extraction of ions and their subsequent ballistic focusing in the hemisphere geometry of the focusing system was used to form a high intensity nitrogen, argon, and hydrogen ion beams. The gas-discharge plasma was formed using a hot-cathode-arc discharge source. The regularities of the formation of high-intensity ion beams of various gases from according to the pressures of the working gases, the plasma density depending dependence on the bias potential amplitudes in the range of 0.9–2.4 kV, frequencies in the range of 10–100 kHz and pulse durations in the range of 2–80 μs were investigated. The possibility of the stable forming of axially symmetric gas ion beams with a current density of up to hundreds of mA/cm 2 was shown. Nitrogen ion beams with a maximum current density of 0.7 A/cm 2 at the ion current of 0.6 A were obtained. Studies at nitrogen pressures in the range of 0.3–1.8 Pa revealed that a decrease in the gas pressure during the generation of a gas-discharge plasma caused a significant increase in the ion current amplitude at the collector.

Язык оригиналаАнглийский
Страницы (с-по)127-133
Число страниц7
ЖурналVacuum
Том165
DOI
СостояниеОпубликовано - 1 июл 2019

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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