Plasma electron source for the generation of wide-aperture pulsed beam at forevacuum pressures

E. Oks, V. Burdovitsin, A. Medovnik, Yu Yushkov

Результат исследований: Материалы для журналаСтатья

10 Цитирования (Scopus)

Аннотация

This article reports on design and application of wide-aperture pulsed beam source, based on hollow cathode discharge. The source is intended for electron beam generation in pressure range 2-15 Pa. Multi-aperture extraction system, used in a source, provided beam cross-section uniformity of 10% on diameter 40 mm. The limiting values of the current density, pulse duration, and accelerating voltage are 350 mA/cm2, 250 μs, and 10 kV, respectively. These parameters are sufficient for surface modification of various materials, including non-conducting matters.

Язык оригиналаАнглийский
Номер статьи023301
ЖурналReview of Scientific Instruments
Том84
Номер выпуска2
DOI
СостояниеОпубликовано - фев 2013

ASJC Scopus subject areas

  • Instrumentation

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