Plasma deposition of alternate TiN/ZrN multilayer hard coatings

M. Braic, V. Braic, M. Balaceanu, G. Pavelescu, A. Vladescu

Результат исследований: Материалы для журналаСтатья

17 Цитирования (Scopus)

Аннотация

Microchemical, microstructural, mechanical and tribe-logical characteristics of alternate TiN/ZrN multilayer coatings were investigated by energy-dispersive X-ray (EDX) spectroscopy, X-ray diffraction (XRD), microhardness and thickness measurements, adhesion and wear resistance tests. The coatings, with various bilayer periods and thicknesses of the individual layers, were deposited on Si and steel substrates by the cathodic arc technique. A comparison with TiN and ZrN monolayer properties was carried out.

Язык оригиналаАнглийский
Страницы (с-по)1399-1404
Число страниц6
ЖурналJournal of Optoelectronics and Advanced Materials
Том5
Номер выпуска5
СостояниеОпубликовано - 1 янв 2003
Опубликовано для внешнего пользованияДа

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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