Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments

Gianina Schondelmaier, Steffen Hartmann, Daniel May, Alexey Shaporin, Sebastian Voigt, R. D. Rodriguez, O. D. Gordan, D. R.T. Zahn, Jan Mehner, Karla Hiller, Bernhard Wunderle

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

3 Цитирования (Scopus)

Аннотация

For properties characterization of nanostructured materials and simultaneously to predict their reliability a tensile testing system consisting of a thermal actuator and a lateral nano-Newton force piezoresistive sensor is presented. The implementation of a piezoresistive load sensor in a MEMS-based tensile testing system can be regarded as an innovative and ultrasensitive method to continuously observe the specimen deformation while simultaneously measuring the applied load electronically with nano-Newton resolution. The primary technique that we have used for the fabrication of these systems is Bonding and Deep Reactive Ion Etching (BDRIE) applied on SOI wafers.

Язык оригиналаАнглийский
Название основной публикации2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013
DOI
СостояниеОпубликовано - 7 авг 2013
Опубликовано для внешнего пользованияДа
Событие2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013 - Wroclaw, Польша
Продолжительность: 14 апр 201317 апр 2013

Конференция

Конференция2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013
СтранаПольша
ГородWroclaw
Период14.4.1317.4.13

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Modelling and Simulation

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