Physicochemical state and electrical transport of inorganic dielectric materials after ion-heat modification. 1. Structural phase variations and properties

A. V. Kabyshev, V. V. Lopatin, Yu F. Ivanov

Результат исследования: Материалы для журналаСтатья

Аннотация

The influence of ion-heat modification on structural and phase variations of heat-resistant inorganic dielectrics has been studied. Pronounced phase transformations are shown to occur in the irradiated surface layer under postimplantation annealing. Their evolution is followed. The optimum conditions of modification realizing transition from dielectric to semiconducting state are determined for oxide and nitride compounds. Electrophysical properties of modified surface of dielectrics are studied.

Язык оригиналаАнглийский
Страницы (с... по...)775-787
Количество страниц13
ЖурналSurface Investigation X-Ray, Synchrotron and Neutron Techniques
Том12
Номер выпуска7
Статус публикацииОпубликовано - 1997

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ASJC Scopus subject areas

  • Surfaces and Interfaces

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