Peculiarities of tungsten, molybdenum and carbon pulse-frequency ion implantation with the use of single-element and composite cathodes

L. N. Puchkareva, S. M. Chesnokov, I. A. Shulepov

    Результат исследований: Материалы для журналаСтатья

    Аннотация

    By means of AES and SIMS methods a comparison studies of depth distribution of Mo, W and C atoms implanted in steel have been carried out. The implantation in pulse-frequency mode was made using single element W, Mo, C cathodes as well as composite WC and MoB cathodes. It is shown that implantation with composite cathodes leads to more intensive alloying a steel and decreasing an alloyed layer depth compared to single-element cathode ion implantation. The difference is connected to variety in charge state of ions generated from single-element and composite cathodes. Obtained results are in agreement with known data on charge state of ion fluxes generated under pulse-frequency implantation with the same cathodes.

    Язык оригиналаАнглийский
    Страницы (с-по)11-15
    Число страниц5
    ЖурналFizika i Khimiya Obrabotki Materialov
    Номер выпуска5
    СостояниеОпубликовано - сен 1998

    ASJC Scopus subject areas

    • Materials Science(all)

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