Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets

Результат исследований: Материалы для журнала

Выдержка

This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

Язык оригиналаАнглийский
Номер статьи032065
ЖурналJournal of Physics: Conference Series
Том1115
Номер выпуска3
DOI
СостояниеОпубликовано - 27 ноя 2018
Событие6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Российская Федерация
Продолжительность: 16 сен 201822 сен 2018

Отпечаток

metal coatings
magnetron sputtering
corrosion tests
nanoindentation
flux (rate)
flux density
coatings
heat
electrical resistivity
scanning electron microscopy
radiation
diffraction
x rays
energy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Цитировать

@article{14caf0822ea144abb8fffdebc742e327,
title = "Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets",
abstract = "This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.",
author = "Bleykher, {G. A.} and Sidelev, {D. V.} and Grudinin, {V. A.} and Krivobokov, {V. P.} and Yuryeva, {A. V.}",
year = "2018",
month = "11",
day = "27",
doi = "10.1088/1742-6596/1115/3/032065",
language = "English",
volume = "1115",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "3",

}

TY - JOUR

T1 - Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets

AU - Bleykher, G. A.

AU - Sidelev, D. V.

AU - Grudinin, V. A.

AU - Krivobokov, V. P.

AU - Yuryeva, A. V.

PY - 2018/11/27

Y1 - 2018/11/27

N2 - This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

AB - This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

UR - http://www.scopus.com/inward/record.url?scp=85058238325&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85058238325&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1115/3/032065

DO - 10.1088/1742-6596/1115/3/032065

M3 - Conference article

AN - SCOPUS:85058238325

VL - 1115

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 3

M1 - 032065

ER -