Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets

Результат исследований: Материалы для журнала

Аннотация

This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

Язык оригиналаАнглийский
Номер статьи032065
ЖурналJournal of Physics: Conference Series
Том1115
Номер выпуска3
DOI
СостояниеОпубликовано - 27 ноя 2018
Событие6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Российская Федерация
Продолжительность: 16 сен 201822 сен 2018

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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