This research provides the numerical simulation of the plasma generation in a hollow cathode as well as the diffusion of nitrogen atoms into the metal in the low-pressure glow discharge plasma. The characteristics of the gas discharge were obtained and the relation of the basic technological parameters and the structural and phase state of the nitrided material were defined. Authors provided the comparison of calculations with the experimental results of titanium nitriding by low-pressure glow discharge plasma in a hollow cathode.
|Журнал||IOP Conference Series: Materials Science and Engineering|
|Состояние||Опубликовано - 7 фев 2017|
ASJC Scopus subject areas
- Materials Science(all)