New approach to plasma diagnostic

A. I. Ryabchikov, I. A. Ryabchikov, I. B. Stepanov, A. A. Sinebryukhov, Yury Petrovich Usov

Результат исследований: Материалы для журналаСтатья

2 Цитирования (Scopus)

Аннотация

The work is devoted to the investigation and development of innovative plasma diagnostics method based on mutual application of plasma immersion and time-of-flight approaches for ion charge state and mass measurements. It is experimentally demonstrated that despite the presence of long tails in ion current waveform measured by Faraday cup, there is a way to increase the spectrometer resolution by several times. The current pulse FWHM equal to 170 ns was reached, that gave a possibility to use this approach for ion charge state and mass measurement for plasma with any element of the Periodic Table.

Язык оригиналаАнглийский
Страницы (с-по)6635-6637
Число страниц3
ЖурналSurface and Coatings Technology
Том201
Номер выпуска15
DOI
СостояниеОпубликовано - 23 апр 2007

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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