Monitoring the mass-charge spectrum of a beam plasma by means of the modernized quadrupole analyzer in the forevacuum pressure range

A. V. Tyunkov, Yu G. Yushkov, A. S. Klimov

Результат исследований: Материалы для журналаСтатья

Аннотация

The design and operation of the modernized quadrupole analyzer of a residual atmosphere are presented Modernization of the analyzer was made by replace the ionizer device on extracting ions node and applying a positive potential on the electron beam collector. Taking into consideration the characteristics of the beam plasma generation and specificity of forevacuum pressure range, this replacement allows monitoring the mass charge composition of such plasma. Presented are the results of investigations of mass-charge composition of ion beam plasma of various gases generated by the continuous electron beam with a current of about 30 mA at a pressure in its distribution up to 10 Pa. It was found that in the beam plasma generated by an electron beam at forevacuum pressure range have been observed only once ionized atoms of residual and the injection gases independently of the energy and the electron beam current.

Язык оригиналаАнглийский
Страницы (с-по)96-99
Число страниц4
ЖурналApplied Physics
Том2016-January
Номер выпуска1
СостояниеОпубликовано - 1 янв 2016

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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