Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range

D. B. Zolotukhin, A. V. Tyunkov, Yu G. Yushkov, E. M. Oks

Результат исследований: Материалы для журналаСтатья

14 Цитирования (Scopus)

Аннотация

The industrial quadrupole RGA-100 residual gas analyzer was modified for the research of electron beam-generated plasma at forevacuum pressure range. The standard ionizer of the RGA-100 was replaced by three electrode extracting unit. We made the optimization of operation parameters in order to provide the maximum values of measured currents of any ion species. The modified analyzer was successfully tested with beam plasma of argon, nitrogen, oxygen, and hydrocarbons.

Язык оригиналаАнглийский
Номер статьи123301
ЖурналReview of Scientific Instruments
Том86
Номер выпуска12
DOI
СостояниеОпубликовано - 1 дек 2015

ASJC Scopus subject areas

  • Instrumentation

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