This paper presents the results of the formation of deep modified layers in 40X13 steel using a high-intensity repetitively pulsed nitrogen ion beam with a current density up to 0.25 A/cm2. An arc generator with a hot cathode provided the DC nitrogen plasma flow. A plasma immersion approach was used for high-frequency, short-pulse very intense nitrogen ion beam formation. A grid hemisphere with radii of 7.5 cm was immersed in the plasma. Negative bias pulses with an amplitude of 1.2 kV, a pulse duration of 4 μs, and a pulse repetition rate of 105 pulses per second were applied to the grid. The substrates were implanted at the temperature of 500 °C and various processing times ranging from 20 to 120 minutes with 1.2 keV nitrogen ions using a very-high current density up to 0.25 A/cm2 ion beams. The work explores the surface morphology, elemental composition, and mechanical properties of deep-layer modified 40X13 steel after low ion energy, very-high-intensity nitrogen ion beam implantation.
|Журнал||Journal of Physics: Conference Series|
|Состояние||Опубликовано - 27 ноя 2018|
|Событие||6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Российская Федерация|
Продолжительность: 16 сен 2018 → 22 сен 2018
ASJC Scopus subject areas
- Physics and Astronomy(all)