Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect

Tamara G. Nesterenko, Evgeniy S. Barbin, Aleksey N. Koleda, Alisa A. Arshinova

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

4 Цитирования (Scopus)

Аннотация

Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.

Язык оригиналаАнглийский
Название основной публикацииXXI IMEKO World Congress "Measurement in Research and Industry"
ИздательIMEKO-International Measurement Federation Secretariat
СостояниеОпубликовано - 2015
Событие21st IMEKO World Congress on Measurement in Research and Industry - Prague, Чешская Республика
Продолжительность: 30 авг 20154 сен 2015

Другое

Другое21st IMEKO World Congress on Measurement in Research and Industry
СтранаЧешская Республика
ГородPrague
Период30.8.154.9.15

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Цитировать

    Nesterenko, T. G., Barbin, E. S., Koleda, A. N., & Arshinova, A. A. (2015). Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. В XXI IMEKO World Congress "Measurement in Research and Industry" IMEKO-International Measurement Federation Secretariat.