Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect

Tamara G. Nesterenko, Evgeniy S. Barbin, Aleksey N. Koleda, Alisa A. Arshinova

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

4 Цитирования (Scopus)

Выдержка

Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.

Язык оригиналаАнглийский
Название основной публикацииXXI IMEKO World Congress "Measurement in Research and Industry"
ИздательIMEKO-International Measurement Federation Secretariat
СостояниеОпубликовано - 2015
Событие21st IMEKO World Congress on Measurement in Research and Industry - Prague, Чешская Республика
Продолжительность: 30 авг 20154 сен 2015

Другое

Другое21st IMEKO World Congress on Measurement in Research and Industry
СтранаЧешская Республика
ГородPrague
Период30.8.154.9.15

Отпечаток

Accelerometers
Thermal effects
MEMS
Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Цитировать

Nesterenko, T. G., Barbin, E. S., Koleda, A. N., & Arshinova, A. A. (2015). Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. В XXI IMEKO World Congress "Measurement in Research and Industry" IMEKO-International Measurement Federation Secretariat.

Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. / Nesterenko, Tamara G.; Barbin, Evgeniy S.; Koleda, Aleksey N.; Arshinova, Alisa A.

XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 2015.

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Nesterenko, TG, Barbin, ES, Koleda, AN & Arshinova, AA 2015, Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. в XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 21st IMEKO World Congress on Measurement in Research and Industry, Prague, Чешская Республика, 30.8.15.
Nesterenko TG, Barbin ES, Koleda AN, Arshinova AA. Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. В XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat. 2015
Nesterenko, Tamara G. ; Barbin, Evgeniy S. ; Koleda, Aleksey N. ; Arshinova, Alisa A. / Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect. XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 2015.
@inproceedings{53585f0a4dc143e3b5617e64ffd9cb09,
title = "Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect",
abstract = "Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.",
keywords = "Elastic suspension, MEMS-based accelerometer, Moving mass, Temperature sensitivity, Thermal errors",
author = "Nesterenko, {Tamara G.} and Barbin, {Evgeniy S.} and Koleda, {Aleksey N.} and Arshinova, {Alisa A.}",
year = "2015",
language = "English",
booktitle = "XXI IMEKO World Congress {"}Measurement in Research and Industry{"}",
publisher = "IMEKO-International Measurement Federation Secretariat",

}

TY - GEN

T1 - Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect

AU - Nesterenko, Tamara G.

AU - Barbin, Evgeniy S.

AU - Koleda, Aleksey N.

AU - Arshinova, Alisa A.

PY - 2015

Y1 - 2015

N2 - Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.

AB - Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.

KW - Elastic suspension

KW - MEMS-based accelerometer

KW - Moving mass

KW - Temperature sensitivity

KW - Thermal errors

UR - http://www.scopus.com/inward/record.url?scp=84951139008&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84951139008&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84951139008

BT - XXI IMEKO World Congress "Measurement in Research and Industry"

PB - IMEKO-International Measurement Federation Secretariat

ER -