Manufacturing of regular microstructures by methods of LIGA - Technologies

M. N. Aumalikova, N. A. Timchenko, S. I. Kuznetsov, B. G. Goldenberg, V. F. Pindurin, S. V. Litvin, V. G. Kanaev

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

1 цитирование (Scopus)

Выдержка

The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.

Язык оригиналаАнглийский
Название основной публикацииProceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012
DOI
СостояниеОпубликовано - 2012
Событие2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Российская Федерация
Продолжительность: 18 сен 201221 сен 2012

Другое

Другое2012 7th International Forum on Strategic Technology, IFOST 2012
СтранаРоссийская Федерация
ГородTomsk
Период18.9.1221.9.12

Отпечаток

Synchrotron radiation
Microstructure
Lithography
Membranes
X rays
Radiation
Manufacturing
Template
Membrane

ASJC Scopus subject areas

  • Management of Technology and Innovation

Цитировать

Aumalikova, M. N., Timchenko, N. A., Kuznetsov, S. I., Goldenberg, B. G., Pindurin, V. F., Litvin, S. V., & Kanaev, V. G. (2012). Manufacturing of regular microstructures by methods of LIGA - Technologies. В Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012 [6357553] https://doi.org/10.1109/IFOST.2012.6357553

Manufacturing of regular microstructures by methods of LIGA - Technologies. / Aumalikova, M. N.; Timchenko, N. A.; Kuznetsov, S. I.; Goldenberg, B. G.; Pindurin, V. F.; Litvin, S. V.; Kanaev, V. G.

Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 2012. 6357553.

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Aumalikova, MN, Timchenko, NA, Kuznetsov, SI, Goldenberg, BG, Pindurin, VF, Litvin, SV & Kanaev, VG 2012, Manufacturing of regular microstructures by methods of LIGA - Technologies. в Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012., 6357553, Tomsk, Российская Федерация, 18.9.12. https://doi.org/10.1109/IFOST.2012.6357553
Aumalikova MN, Timchenko NA, Kuznetsov SI, Goldenberg BG, Pindurin VF, Litvin SV и соавт. Manufacturing of regular microstructures by methods of LIGA - Technologies. В Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 2012. 6357553 https://doi.org/10.1109/IFOST.2012.6357553
Aumalikova, M. N. ; Timchenko, N. A. ; Kuznetsov, S. I. ; Goldenberg, B. G. ; Pindurin, V. F. ; Litvin, S. V. ; Kanaev, V. G. / Manufacturing of regular microstructures by methods of LIGA - Technologies. Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 2012.
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