Manufacturing of regular microstructures by methods of LIGA - Technologies

M. N. Aumalikova, N. A. Timchenko, S. I. Kuznetsov, B. G. Goldenberg, V. F. Pindurin, S. V. Litvin, V. G. Kanaev

Результат исследования: Материалы для книги/типы отчетовМатериалы для конференции

1 Цитирования (Scopus)

Аннотация

The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.

Язык оригиналаАнглийский
Заголовок главной публикацииProceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012
DOI
Статус публикацииОпубликовано - 2012
Событие2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Российская Федерация
Длительность: 18 сен 201221 сен 2012

Другое

Другое2012 7th International Forum on Strategic Technology, IFOST 2012
СтранаРоссийская Федерация
ГородTomsk
Период18.9.1221.9.12

    Fingerprint

ASJC Scopus subject areas

  • Management of Technology and Innovation

Цитировать

Aumalikova, M. N., Timchenko, N. A., Kuznetsov, S. I., Goldenberg, B. G., Pindurin, V. F., Litvin, S. V., & Kanaev, V. G. (2012). Manufacturing of regular microstructures by methods of LIGA - Technologies. В Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012 [6357553] https://doi.org/10.1109/IFOST.2012.6357553