Low-energy plasma-immersion implantation of nitrogen ions in titanium by a beam with ballistic focusing

I. V. Lopatin, Yu H. Akhmadeev, O. S. Korneva, O. V. Krysina, E. A. Petrikova, N. A. Prokopenko, A. I. Ryabchikov, D. O. Sivin

Результат исследований: Материалы для журнала

Аннотация

The results of experiments on low-energy implantation of nitrogen ions into VT1-0 titanium alloy are presented. Processing was performed by a nitrogen ion pulsed beam obtained using a ballistic ion focusing system. An ion source was a nitrogen plasma of the non-self-sustained gas arc discharge with a thermionic cathode. It has been shown that when the specimens are processed in such a system, hardness of the surface increases from 1.5 to 2.5 times. In addition, the surface of the specimens undergoes ion etching which causes the formation of an etching cavity whose profile depends on the ion effect parameters.

Язык оригиналаАнглийский
Номер статьи032043
ЖурналJournal of Physics: Conference Series
Том1115
Номер выпуска3
DOI
СостояниеОпубликовано - 27 ноя 2018
Событие6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Российская Федерация
Продолжительность: 16 сен 201822 сен 2018

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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