A high-current accelerator for pumping of the 200-L excimer laser is developed, providing electron energy of 550 keV, a diode current of 320 kA, and an e-beam current of 250 kA. The high-voltage part of the accelerator consists of two linear transformers with a stored energy of 98 kJ. To reduce the influence of the self-magnetic field on e-beam formation, the vacuum diode is divided into six separate magnetically isolated diodes.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Surfaces and Interfaces