Laser monitor for imaging single crystal diamond growth in H2-CH4 microwave plasma

Gennadiy Evtushenko, Stanislav Torgaev, M. Trigub, Dmitry Shiyanov, Egor Bushuev, Andrey Bolshakov, Konstantin Zemskov, Valery Savransky, Viktor Ralchenko, Vitaly Konov

Результат исследований: Материалы для журналаСтатья

Выдержка

We used an active optical system referred to as ‘laser monitor’ based on a copper bromide vapor brightness amplifier for imaging a diamond crystal surface during its synthesis in a microwave plasma in CH4-H2 gas mixture. The approach allows observation of an entire crystal without interrupting the chemical vapor deposition process. It is demonstrated that the broadband plasma background radiation with the brightness temperature of about 3000 K does not interfere with object real-time monitoring at the laser wavelength of 510.6 nm. High quality images obtained using both passive (laser illumination) and active (laser monitor) methods provide information about the surface relief of the growing crystal with resolution of a few tens of micrometer. Each frame is formed through one pulse (about 30 ns), with the maximum frame rate being 20,000 frames/sec.

Язык оригиналаАнглийский
Номер статьи105716
ЖурналOptics and Laser Technology
Том120
DOI
СостояниеОпубликовано - 1 дек 2019

Отпечаток

Diamond
monitors
Diamonds
diamonds
Microwaves
Single crystals
Plasmas
Imaging techniques
microwaves
Lasers
single crystals
lasers
Luminance
Crystals
background radiation
brightness temperature
Bromides
crystal surfaces
Crystal growth
Gas mixtures

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Цитировать

Laser monitor for imaging single crystal diamond growth in H2-CH4 microwave plasma. / Evtushenko, Gennadiy; Torgaev, Stanislav; Trigub, M.; Shiyanov, Dmitry; Bushuev, Egor; Bolshakov, Andrey; Zemskov, Konstantin; Savransky, Valery; Ralchenko, Viktor; Konov, Vitaly.

В: Optics and Laser Technology, Том 120, 105716, 01.12.2019.

Результат исследований: Материалы для журналаСтатья

Evtushenko, Gennadiy ; Torgaev, Stanislav ; Trigub, M. ; Shiyanov, Dmitry ; Bushuev, Egor ; Bolshakov, Andrey ; Zemskov, Konstantin ; Savransky, Valery ; Ralchenko, Viktor ; Konov, Vitaly. / Laser monitor for imaging single crystal diamond growth in H2-CH4 microwave plasma. В: Optics and Laser Technology. 2019 ; Том 120.
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abstract = "We used an active optical system referred to as ‘laser monitor’ based on a copper bromide vapor brightness amplifier for imaging a diamond crystal surface during its synthesis in a microwave plasma in CH4-H2 gas mixture. The approach allows observation of an entire crystal without interrupting the chemical vapor deposition process. It is demonstrated that the broadband plasma background radiation with the brightness temperature of about 3000 K does not interfere with object real-time monitoring at the laser wavelength of 510.6 nm. High quality images obtained using both passive (laser illumination) and active (laser monitor) methods provide information about the surface relief of the growing crystal with resolution of a few tens of micrometer. Each frame is formed through one pulse (about 30 ns), with the maximum frame rate being 20,000 frames/sec.",
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AU - Trigub, M.

AU - Shiyanov, Dmitry

AU - Bushuev, Egor

AU - Bolshakov, Andrey

AU - Zemskov, Konstantin

AU - Savransky, Valery

AU - Ralchenko, Viktor

AU - Konov, Vitaly

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