RBS, ERD, resonant elastic Backscattering Spectrometry of 1H+ and 4He+ ions, electrical resistivity analysis were used to study properties of near-surface layers of modified nanocrystalline α-BN and α-Al2O3 ceramics. High-fluence and high-flux pulse implantation of Ti+n ions and post-implantation thermal annealing in vacuum were utilised for modification of the ceramics. As a result of implantation and subsequent annealing, thermally stable (up to 1600 K) low electrical conductive surface coatings were formed. Observed changes in elements depth profiles and in surface electrical resistivity of these coatings as a result of the post-implantation thermal treatment are discussed in connection with temperature evolution of the damage microstructure.
|Журнал||Materials Science Forum|
|Состояние||Опубликовано - 1997|
ASJC Scopus subject areas
- Materials Science(all)