Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering

N. N. Nikitenkov, E. S. Kiselyova, Maxim Evgenievich Konishchev, V. S. Sypchenko, Aleksey Nikolaevich Nikitenkov, V. F. Pichugin, Ivan Anisimovich Shulepov, M. Epple

Результат исследований: Материалы для журналаСтатьярецензирование

2 Цитирования (Scopus)

Аннотация

The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.

Язык оригиналаАнглийский
Страницы (с-по)1230-1234
Число страниц5
ЖурналJournal of Surface Investigation
Том8
Номер выпуска6
DOI
СостояниеОпубликовано - 1 янв 2014

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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