Investigation of regularity of plasma formation in large volume on the basis of the hollow cathode effect using high-frequency short-pulsed voltage

A. I. Ryabchikov, Denis Olegovich Sivin, Peter Semenovich Anan'in, K. Yu Dodorin

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Аннотация

The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadily burns at the pressure of 0.1 Pa and higher, the discharge current value and plasma concentration grow as the voltage pulse duration and voltage amplitude increase, the general discharge current reaches 10 A, providing the density of the ion saturation current on the items placed in plasma up to 0.5 mA/cm2.

Язык оригиналаАнглийский
Название основной публикацииProceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012
DOI
СостояниеОпубликовано - 2012
Событие2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Российская Федерация
Продолжительность: 18 сен 201221 сен 2012

Другое

Другое2012 7th International Forum on Strategic Technology, IFOST 2012
СтранаРоссийская Федерация
ГородTomsk
Период18.9.1221.9.12

ASJC Scopus subject areas

  • Management of Technology and Innovation

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